EdX

Vacuum Systems and Technology (edX)

Offered by National Research Nuclear University MEPhI, MEPhIx,
Vacuum Systems and Technology (edX)

Learn the principles of vacuum systems and their applications in modern technologies. Vacuum technology is key to our high-tech society. It is is used for a large number of technical processes and products, including computer chips, nanostructures, microelectronic coatings and components as well as chemical and biological techniques.

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In this engineering course, you will get a comprehensive overview of the construction and working principles of vacuum devices and systems to help you better design materials and processes .

What you'll learn

  • Gain an understanding about working principles and construction of a separate components of vacuum systems;
  • How to design and calculate necessary parameters of vacuum systems;
  • Needed components for vacuum systems.

Syllabus

Section 1. Vacuum theory

  • Vacuum application. Introducing on molecular-kinetic theory of gases
  • Molecular-kinetic theory of gases
  • Sorption phenomena in vacuum
  • Condensation and evaporation
  • Physical processes in vacuum

Section 2. Mechanical means of obtaining a vacuum

  • Mechanical vacuum pumps of preliminary vacuum. Construction, working principles and characteristics. Part 1
  • Mechanical vacuum pumps of preliminary vacuum. Construction, working principles and characteristics. Part 2
  • Turbine and diffusion pumps. Construction, working principles and characteristics
  • Ejector pump. Vacuum traps. Construction, working principles and characteristics

Section 3. Physical-chemical means of obtaining a vacuum

  • Ion and ion-getter pumps. Construction, working principles and characteristics
  • Sublimation and sputter ion pumps. Construction, working principle, characteristics
  • Sorption and condensation pumps. Construction, working principles and characteristics

Section 4. Methods of pressure measurement

  • Methods of total pressure measurement. Aneroid and hydrostatic vacuum gauges
  • Methods of total pressure measurement. Thermal vacuum gauges
  • Methods of total pressure measurement. Ionization vacuum gauges
  • Methods of partial pressure measurement. Type of analyzers and traps
  • Methods of partial pressure measurement. Mass-spectrometers

Section 5. Constructional elements of vacuum systems

  • Valves and gates. Construction, working principle
  • Leek valves. Construction, working principle
  • Vacuum feedthroughs
  • Methods of leak detection

Section 6. Construction principles of vacuum systems

  • Calculation of vacuum systems to select of vacuum pumps
  • Vacuum systems with diffusion and turbine pumps
  • Vacuum systems with ion and condensation pumps
  • Type of sealing
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