Learn the principles of vacuum systems and their applications in modern technologies. Vacuum technology is key to our high-tech society. It is is used for a large number of technical processes and products, including computer chips, nanostructures, microelectronic coatings and components as well as chemical and biological techniques.
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In this engineering course, you will get a comprehensive overview of the construction and working principles of vacuum devices and systems to help you better design materials and processes .
What you'll learn
- Gain an understanding about working principles and construction of a separate components of vacuum systems;
- How to design and calculate necessary parameters of vacuum systems;
- Needed components for vacuum systems.
Syllabus
Section 1. Vacuum theory
- Vacuum application. Introducing on molecular-kinetic theory of gases
- Molecular-kinetic theory of gases
- Sorption phenomena in vacuum
- Condensation and evaporation
- Physical processes in vacuum
Section 2. Mechanical means of obtaining a vacuum
- Mechanical vacuum pumps of preliminary vacuum. Construction, working principles and characteristics. Part 1
- Mechanical vacuum pumps of preliminary vacuum. Construction, working principles and characteristics. Part 2
- Turbine and diffusion pumps. Construction, working principles and characteristics
- Ejector pump. Vacuum traps. Construction, working principles and characteristics
Section 3. Physical-chemical means of obtaining a vacuum
- Ion and ion-getter pumps. Construction, working principles and characteristics
- Sublimation and sputter ion pumps. Construction, working principle, characteristics
- Sorption and condensation pumps. Construction, working principles and characteristics
Section 4. Methods of pressure measurement
- Methods of total pressure measurement. Aneroid and hydrostatic vacuum gauges
- Methods of total pressure measurement. Thermal vacuum gauges
- Methods of total pressure measurement. Ionization vacuum gauges
- Methods of partial pressure measurement. Type of analyzers and traps
- Methods of partial pressure measurement. Mass-spectrometers
Section 5. Constructional elements of vacuum systems
- Valves and gates. Construction, working principle
- Leek valves. Construction, working principle
- Vacuum feedthroughs
- Methods of leak detection
Section 6. Construction principles of vacuum systems
- Calculation of vacuum systems to select of vacuum pumps
- Vacuum systems with diffusion and turbine pumps
- Vacuum systems with ion and condensation pumps
- Type of sealing
